Design and fabrication of the trapezoidal electrostatic comb-drive actuator

Pham Hong Phuc; Dinh Khac Toan; Dang Bao Lam; Nguyen Tuan Khoa; Nguyen Tien Dung

Năm xuất bản2012

Nguồn học thuậtVietnam Journal of Mechanics

Định danhDOI 10.15625/0866-7136/34/4/2338

TRÍCH DẪN ĐỀ XUẤTAPA 7

Pham Hong Phuc; Dinh Khac Toan; Dang Bao Lam; Nguyen Tuan Khoa; Nguyen Tien Dung (2012). Design and fabrication of the trapezoidal electrostatic comb-drive actuator. Vietnam Journal of Mechanics, 34(4), 261-269. https://doi.org/10.15625/0866-7136/34/4/2338

Thông tin thư mục

Nguồn/Tạp chí: Vietnam Journal of Mechanics
Tập: 34
Số: 4
Trang: 261-269
Nhà xuất bản: Publishing House for Science and Technology, Vietnam Academy of Science and Technology (Publications)
Quốc gia: VN
DOI: 10.15625/0866-7136/34/4/2338 ↗

Từ khóa

Mechanical engineering and machinery; Descriptive and experimental mechanics